Discrete, shallow doping of semiconductors via cylinder-forming block copolymer self-assembly
Y. Zhang+, S.P.O. Danielsen, B.C. Popere, A.T. Heitsch, M. Li, P. Trefonas, R.A. Segalman*, and R. Katsumata*,+, “Discrete, shallow...
Discrete, shallow doping of semiconductors via cylinder-forming block copolymer self-assembly
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